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Perkin-Elmer 851-8618-004 Processor PCB Card A5167 Rev. B SVG ASML 90S Used Part No: MR-25313 This MutoPerkin Elmer 851 8618 004 Processor PCB Card A5167 Rev. B SVG ASML 90S Used Inventory # A 12445, 7930 This Perkin Elmer 851 8618 004 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a ASML SVG Silicon Valley Group 90S DUV Lithography System. Specifications Part No: 851 8618 004 Model No: A5167 Rev. B Removed from a ASML SVG Silicon Valley Group 90S DUV Lithography System Sale