TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Working 03-285821-00

03-285821-00

Part No: 13-8092-027 This Lam Research 13-8092-027 Platform Support Bar is used working surplus

BRD # 800061G

Inventory # G296

0120-93443

TEL Tokyo Electron 5087-400487-15 Valve Assembly DEV.SOLUTION2 Lithius Working 03-285821-00TEL Tokyo Electron 5087 400487 15 Valve Assembly DEV. SOLUTION2 Lithius Working Part No: 5087 400487 15 Model No: VALVE ASSY (2NDAMF) DEV. SOLUTION2 Develop Process Station, DEV ASSY Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List CKD Valve Part No: AMF V X1 Assembly Part No: 5087 400487 15 VALVE ASSY(2NDAMF) 5010 201961 12 BASE(AMF) 1 5010 402583 11 COVER 1 5010 403084 11 PLATE 1 5004 100010 11 JOINT